Ensights

Science that is transforming lives and enabling the future

How Predictable is Your Lithography Process?

All Posts

How Predictable is Your Lithography Process?

Lithographer’s face the challenge to translate designs into reproducible patterns that meet their yield, parametric performance, and reliability goals. Success or failure relies heavily on the controls in place that limit process variation. Recognizing and addressing all the sources of lithography pattern variations can preoccupy lithographers.

 

Hence the question, where can pattern flaws originate?

 

 

Lithography

 Click the image to see this process in motion

 

You’re not alone in mitigating these challenges.  Collaboration between fabs, equipment makers, materials suppliers, and designers can lead to a more holistic approach to finding the root cause.

 

Join the conversation at www.entegris.com/pattern to identify the sources of your pattern integrity challenges.

 

 

Related Posts

Zero-Defect Collaborations in the Autonomous Vehicle Supply Chain

The automotive supply chain is transforming with the development of autonomous vehicles. The rise of electronic systems leads designers and manufacturers to seek collaboration partnerships. Antoine Amade, senior director EMEA/NA sales, was recently interviewed by SEMI to discuss the zero-defect challenges facing semiconductor fabs and the expansion of the GAAC (Global Automotive Advisory Council).

How to Select the Right Container System for Safe, Clean Chemical Delivery

Ensuring Purity and Safety Purity requirements continue to tighten as the semiconductor manufacturers continue to pursue advanced technology nodes.  Of all the industries that rely on a consistent supply of both raw and specialty chemical, the semiconductor industry sets the highest bar.

Hiding in Plain Sight: A Preventative Maintenance Strategy to Improve Gas Purity and Reduce Wafer Defects

During the semiconductor manufacturing process, contamination can be introduced from the air, equip­ment, cleanroom personnel, process water, process chemicals, and process gases.1 Careful identification of the contaminant source is required to best identify mitigation strategies that utilize filtration. Installing a filter can reduce defectivity, but this mitigation strategy will not indefinitely protect a gas stream from con­tamination.