Dewetting and non-dewetting are not common terms used every day, yet are vital to the functionality of liquid filters.

• Wetting – the process of filling a membrane’s pores with a liquid
• Dewetting – the phenomenon where a filter membrane’s pores accumulate air over time, blocking liquid flow
• Non-dewetting – a membrane surface that has been modified to maintain wettability over time, even when confronted by outgassing chemistries

The terminology aside, the value of a non-dewetting membrane can’t be understated in terms of operational efficiency and effectiveness. A filter that dewets in a particular semiconductor unit process can contribute to an increase in defectivity or a reduction in productivity due to flow loss.

Watch as Dr. Aiwen Wu, senior applications engineer, demonstrates membrane properties designed to address outgassing chemistries. 

Related: The Lithographer's Toolkit