hero-654791312-sized

Ensights

Science that is transforming lives and enabling the future

CMP Defect Control for Bulk Slurry Manufacturing

All Posts

CMP Defect Control for Bulk Slurry Manufacturing

The purpose of a CMP process is simple – to planarize the top layer of oxide or metal with an abrasive slurry. Manufacturing the slurry to the exacting standards required by the end user is not easy. To effectively planarize the wafer surfaces, both large and small abrasive particles must be removed prior to being dispensed. Thus, the target is a narrow particle size distribution between 30 and 200 nm to prevent both microscratches and underlayer defects.

In this video Bradley Wood, engineering manager, shares the details of a contamination control strategy to optimize the CMP process.


To effectively meet the narrow particle size distribution for fumed silica, colloidal silica (SiO), ceria (CeO), or alumina (Al2O3) nanoparticles, a solutions-based approach enables all touch points in the supply chain to maintain the quality standards of end users.

To learn more about holistic CMP solutions from Entegris, please visit www.entegris.com/cmp

Related Posts

Filtering Out the Noise: What You May Not Know About Everyday Purity

Whether it is a deliberate strategy or serendipity, the innovations that shape our lives are the result of skilled people put into the right environment to create something new. Innovation is not an exact science, but persistence and some good luck have yielded all the amazing tools and technology we rely upon.

SEMICON West 2022 Event Recap: An Interview with Entegris' Dr. David Medeiros

Entegris recently participated at SEMICON West in San Francisco, CA, July 12 – 14. After three years without a major onsite presence, the team was eager to be back in person and engage face-to-face with key customers and suppliers.

How to Minimize Risk for Short-term or Long-term Frozen Storage of Biologics

Like Benjamin Franklin once stated, “An ounce of prevention is worth a pound of cure.” This could be said for mitigating risk to storage of your biologics too. Even the slightest temperature change from a freezer door being opened and closed numerous times to setting alarms off while searching for product hidden inside can compromise drug product. Losing time and money over product can be prevented. Here are some tips to keep your biologics viable in both long- and short-term freezer storage.