Ensights

Science that is transforming lives and enabling the future

Chasing the Perfect Pattern - What’s in Your Toolkit?

All Posts

Chasing the Perfect Pattern - What’s in Your Toolkit?

What are the toughest challenges lithographer's face to reduce process variations?

 

We’re debunking the chemical filtration and purification myths to reduce wafer defects in lithography processes.
10421-Chasing-the-Perfect-Pattern-SME

 

First introduced at the SPIE Advanced Lithography conference, Jennifer Braggin, senior applications technologist, described the various tools in use today across leading-edge and mainstream semiconductor manufacturing processes to reduce wafer defects. Solutions are emerging through collaborations among materials, toolmakers, fabs, and end-users to examine the impact of particles, metals, gels, and organics on the performance of the process.

 

Register here for the Lithographer’s Toolkit webinar on May 29 at 10 AM EST to join the conversation and optimize your contamination control plan.

 

Related Posts

Let's Reflect: Q2 2019

Q2 was full of celebrations with the Anniversary of Moore’s Law and Global Internet of Things (IoT) Day. Check out more of Q2’s highlights and join us as we continue to fuel the Fourth Industrial Revolution and travel down the road to “smart everything.”

ICYMI: SEMICON West Highlight Reel

Take a look at what we were up to during SEMICON West 2019. From our CEO's appointment as chairman of SEMI, to the launch of our interactive well-managed fab app, we had a busy couple of days.