hero-654791312-sized

Ensights

Science that is transforming lives and enabling the future

Case Study: On-Wafer Defect Reduction in Lithography

All Posts

Case Study: On-Wafer Defect Reduction in Lithography

Overview

The rapid increase of semiconductors in cars enables significant safety, connectivity, mobility, and sustainability improvements. As transportation transforms from being driver controlled to software controlled, automakers must look closer at their ability to measure and maintain product reliability throughout the vehicle’s lifetime.

In today’s microelectronics manufacturing facilities, Advanced Fault Detection Classification (FDC) is required even more to guarantee quality in terms of process stability, defect reduction, and tighter uniformity.

In collaboration with STMicroelectronics, this case study looks at how to effectively collect data to improve your process control strategy and lower defectivity.

Customer Issue

Our customer’s resist dispense pump installed base was old and aging. Filtration was not always under control and thus negatively affecting dispense repeatability and stability. In addition, they were looking for a way to collect detailed dispense line status data to improve their photolithography process.

Approach IntelliGen_ULV-3150-1215

We proposed they evaluate our IntelliGen® LV two-stage technology dispense system that offers:

1.  independent filtration and dispense functionality

2.  dispense monitoring and confirmation capabilities


Two-Stage Dispense Technology

ENTG-dispense-technology-fig-1-2

Figure 1: During filtration (idle times between dispenses), the dispense pump's motor reverses
direction and the feed pump pushes the fluid slowly through the filter at the programmed rate (typically
0.1 to 0.5 mL/sec).
Figure 2: During dispense, the filter is isolated from
the dispense chamber to minimize pressure changes
that affect repeatability. Typical dispense rates are between 1 and 2 mL/sec.


Read the full case study
to better understand the difference with a single-stage pump technology and know more about the dispense monitoring and confirmation capabilities.

Results

Thanks to Entegris’ solution, STMicroelectronics achieved

  • Three times lower wafer defectivity
  • 30% tighter wafer dispense uniformity
  • Stability over six months of operation

Download the full case study to see the experiment design and illustrations of the results.


ConclusionSTMicroelectronics

According to STMicroelectronics, the IntelliGen dispense pump from Entegris is one of the best pump resist systems. It enabled guaranteed process stability, thickness uniformity, defectivity reduction, and statistical process control (SPC.) The network communication capability allowed data collection and storage in fab management systems. All these features combined to greatly improve the process quality and significantly reduce wafer excursions.

For more information on this solution, please visit the IntelliGen LV Dispense Systems product page.

 

Related Posts

Entegris and Farrar Scientific Announce New Collaboration

Entegris is proud to announce a new relationship with Farrar Scientific, by Trane Technologies – a global climate innovator. Farrar offers best-in-class operating systems for ultra-cold temperature storage and controlled rate freeze/thaw chambers for pharmaceutical, biotech, and biorepository applications. Entegris offers the best-in-class Aramus™ bag for robust cold storage and transport. Collaborating with Farrar enables Entegris to offer a combined solution that accelerates the freeze/thaw process. Powered by Trane Technologies, Farrar’s solutions fill an unmet need for large pharmaceutical and biopharmaceutical customers requiring flexible, modular, and efficient ultra-low temperature freeze/thaw processing, as well as -80°C (-112°F) bulk storage reach-ins and -70°C (-94°F) pallet chambers. Farrar’s offerings and monitoring services, which include predictive analytics, provide an alternative to large-scale freezer farms or capital-intensive cold rooms used in the manufacturing of drugs, vaccines, and other biological products. Forced air convection cooling in Farrar’s controlled rate chamber greatly reduces +40˚ to -80˚C (+104° to -112°F) freeze/thaw times from days or weeks to hours, optimizing manufacturing efficiency and improving characteristics such as uniformity and repeatability versus competing technologies."This collaboration is a win-win for the industry,” said Holly Paeper, president, Trane Technologies Life Science Solutions. “Farrar and Entegris solutions jointly represent a step forward in reliability, simplicity, and affordability for end-to-end bioprocessing. We’re excited to discover how we can jointly advance precision temperature technology that helps protect quality and optimizes manufacturing.” Entegris will showcase Farrar’s controlled rate chamber in our new Life Sciences Technology Center in Billerica, MA, which offers life sciences customers the opportunity to leverage our expertise in cold-chain challenges to reduce costs, increase speed to market, and optimize processes. This premier facility brings Entegris’ tools and technologies together in one place, where customers can test equipment for freeze/thaw processes to determine which products best fit their needs. As part of our solutions for manufacturing challenges, we now offer Aramus shaped 2D single-use bags with custom shapes, sizes, and assembly configurations for customers’ space and function requirements. They are resistant to extreme cold temperatures and withstand gamma sterilization, which makes them a preferred solution for freezing, transporting, storing, and thawing drug substances, like COVID-19 vaccines, cell therapies, and gene therapies. “Our new technology center enables our customers to really understand the whole freezing process and optimize it before setting up a new lab of their own,” said John Lynch, vice president, Entegris. “Together with Farrar we are able to provide novel and high-value options for bulk drug freezing.”

Entegris and HOF begin Partnership to bring Added Value to Biopharm Bulk Drug Substance, Cold Storage, and Transport

Entegris is proud to announce a new relationship with HOF Sonderanlagenbau GmbH, an international provider of freeze/thaw equipment and special solutions for the pharmaceutical and biotechnology sectors. Entegris offers the best-in-class Aramus™ bag for robust cold storage and transport. Collaborating with HOF enables Entegris to offer a combined solution for our customers that accelerate the freeze/thaw process and help showcase our new Life Sciences Technology Center, built to offer customers the opportunity to leverage our cold-chain supply expertise to optimize processes, reduce costs, and increase speed to market.

Fire and Smoke: Outdoor Air Quality and Your Fab

Summer is the perfect season to enjoy the great outdoors with friends and family. Unless, of course, the air is filled with smoke and ash. The color-coded air quality readings too often go beyond the red danger zone into purple, with an Air Quality Index (AQI) of over 200 parts per million (ppm) of particulate contamination. This particulate count is far above what is safe even for healthy adults. In many parts of the western U.S. and beyond, purple air has become far too familiar.